"Effect of Low Temperature Annealing on the Surface Conductivity of Si in ..."

George Cheroff, Frank F. Fang, Frederick Hochberg (1964)

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DOI: 10.1147/RD.84.0416

access: closed

type: Journal Article

metadata version: 2020-03-13

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George Cheroff, Frank F. Fang, Frederick Hochberg:
Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System. IBM J. Res. Dev. 8(4): 416-421 (1964)

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