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"Impact of lens aberrations on optical lithography."

Timothy A. Brunner (1997)

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DOI: 10.1147/RD.411.0057

access: closed

type: Journal Article

metadata version: 2020-03-13

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Timothy A. Brunner:
Impact of lens aberrations on optical lithography. IBM J. Res. Dev. 41(1&2): 57-68 (1997)

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