"A statistical approach to quality control of non-normal lithographical ..."

Robert M. Booth Jr. et al. (1992)

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DOI: 10.1147/RD.365.0835

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type: Journal Article

metadata version: 2020-03-13

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Robert M. Booth Jr., Kurt A. Tallman, Timothy J. Wiltshire, Pui L. Yee:
A statistical approach to quality control of non-normal lithographical overlay distributions. IBM J. Res. Dev. 36(5): 835-844 (1992)

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