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"Reduction of electromigration in aluminium films by copper doping."

Irving Ames, Francois Max d'Heurle, Richard E. Horstmann (2000)

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DOI: 10.1147/RD.441.0089

access: closed

type: Journal Article

metadata version: 2020-03-13

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Irving Ames, Francois Max d'Heurle, Richard E. Horstmann:
Reduction of electromigration in aluminium films by copper doping. IBM J. Res. Dev. 44(1): 89-92 (2000)

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