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"Key measurements of ultrathin gate dielectric reliability and in-line ..."

W. W. (Bill) Abadeer et al. (1999)

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DOI: 10.1147/RD.433.0407

access: closed

type: Journal Article

metadata version: 2023-01-20

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  - journals/ibmrd/AbadeerBCGLLMMMMN99
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  - https://dblp.org/rec/journals/ibmrd/AbadeerBCGLLMMMMN99
W. W. (Bill) Abadeer, Asmik Bagramian, David W. Conkle, Charles W. Griffin, Eric D. Langlois, Brian F. Lloyd, Raymond P. Mallette, James E. Massucco, Jonathan M. McKenna, Steven W. Mittl, Philip H. Noel:
Key measurements of ultrathin gate dielectric reliability and in-line monitoring. IBM J. Res. Dev. 43(3): 407-416 (1999)

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