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"Adaptive Positioning Of Mems Production System With Nano - Resolution."

Gregor Skorc, Riko Safaric (2012)

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DOI: 10.1080/10798587.2012.10643250

access: closed

type: Journal Article

metadata version: 2021-02-26

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Gregor Skorc, Riko Safaric:
Adaptive Positioning Of Mems Production System With Nano - Resolution. Intell. Autom. Soft Comput. 18(4): 381-398 (2012)

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