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"Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors."
Yadollah Hezarjaribi et al. (2011)
- Yadollah Hezarjaribi, Mohd Hamidon, Roslina Mohd Sidek, Keshmiri Hossein, Raja Abdullah, Alireza Bahadorimehr:
Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors. Int. Arab J. Inf. Technol. 8(2): 141-146 (2011)
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