"Intelligent adaptive process control using dynamic deadband for ..."

Hyo-Heon Ko et al. (2011)

> Home

Details and statistics

DOI: 10.1016/J.ESWA.2010.12.073

access: closed

type: Journal Article

metadata version: 2024-05-07

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/eswa/KoKKBK11
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/eswa/KoKKBK11
Hyo-Heon Ko, Jun-Seok Kim, Jihyun Kim, Jun-Geol Baek, Sung-Shick Kim:
Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing. Expert Syst. Appl. 38(6): 6759-6767 (2011)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.