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"Use of neural network to model X-ray photoelectron spectroscopy data for ..."

Byungwhan Kim, Jeong Kim, Seongjin Choi (2009)

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DOI: 10.1016/J.ESWA.2009.03.004

access: closed

type: Journal Article

metadata version: 2017-05-26

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Byungwhan Kim, Jeong Kim, Seongjin Choi:
Use of neural network to model X-ray photoelectron spectroscopy data for diagnosis of plasma etch equipment. Expert Syst. Appl. 36(8): 11347-11351 (2009)

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