"Wavelet-coupled backpropagation neural network as a chamber leak detector ..."

Byungwhan Kim, Sanghee Kwon (2011)

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DOI: 10.1016/J.ESWA.2010.11.088

access: closed

type: Journal Article

metadata version: 2017-05-26

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Byungwhan Kim, Sanghee Kwon:
Wavelet-coupled backpropagation neural network as a chamber leak detector of plasma processing equipment. Expert Syst. Appl. 38(5): 6275-6280 (2011)

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