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"The implementation of neural network for semiconductor PECVD process."
Wen-Chin Chen et al. (2007)
- Wen-Chin Chen, Amy H. I. Lee, Wei-Jaw Deng
, Kan-Yuang Liu:
The implementation of neural network for semiconductor PECVD process. Expert Syst. Appl. 32(4): 1148-1153 (2007)
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