"Parametererregte mikroelektromechanische Systeme (MEMS)."

Till Jochen Kniffka, Horst Ecker (2015)

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DOI: 10.1007/S00502-015-0372-8

access: closed

type: Journal Article

metadata version: 2020-06-04

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Till Jochen Kniffka, Horst Ecker:
Parametererregte mikroelektromechanische Systeme (MEMS). Elektrotech. Informationstechnik 132(8): 456-461 (2015)

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