"Modeling of chemical mechanical polishing process using FEM and abductive ..."

Yeou-Yih Lin, Ship-Peng Lo (2005)

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DOI: 10.1016/J.ENGAPPAI.2004.09.008

access: closed

type: Journal Article

metadata version: 2020-02-20

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Yeou-Yih Lin, Ship-Peng Lo:
Modeling of chemical mechanical polishing process using FEM and abductive network. Eng. Appl. Artif. Intell. 18(3): 373-381 (2005)

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