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"Detecting and Scoring Equipment Faults in Real Time During Semiconductor ..."

Yi-Hsin Wu et al. (2021)

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DOI: 10.1109/MDAT.2020.3036591

access: closed

type: Journal Article

metadata version: 2021-09-16

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Yi-Hsin Wu, Jui-Yu Huang, Yi-Chun Yao, Yin-Jing Tien, Cheng-Juei Yu, Sheng-De Wang:
Detecting and Scoring Equipment Faults in Real Time During Semiconductor Test Processes. IEEE Des. Test 38(4): 119-126 (2021)

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