"Using Atomic Force Microscopy for Deep-Submicron Failure Analysis."

Jien-Chung Lo, William D. Armitage, Corbet S. Johnson (2001)

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DOI: 10.1109/54.902818

access: closed

type: Journal Article

metadata version: 2020-05-17

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Jien-Chung Lo, William D. Armitage, Corbet S. Johnson:
Using Atomic Force Microscopy for Deep-Submicron Failure Analysis. IEEE Des. Test Comput. 18(1): 10-18 (2001)

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