Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Plasma etching and feature evolution of organic low-k material by using ..."

Toshiaki Makabe, T. Shimada, Takashi Yagisawa (2007)

> Home

Details and statistics

DOI: 10.1016/J.CPC.2007.02.050

access: closed

type: Journal Article

metadata version: 2020-11-20

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/cphysics/MakabeSY07
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/cphysics/MakabeSY07
Toshiaki Makabe, T. Shimada, Takashi Yagisawa:
Plasma etching and feature evolution of organic low-k material by using VicAddress. Comput. Phys. Commun. 177(1-2): 64-67 (2007)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.