"Parametric Operator Inference to Simulate the Purging Process in ..."

Seunghyon Kang, Hyeonghun Kim, Boris Kramer (2025)

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DOI: 10.48550/ARXIV.2504.03990

access: open

type: Informal or Other Publication

metadata version: 2025-05-19

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  - journals/corr/abs-2504-03990
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  - https://dblp.org/rec/journals/corr/abs-2504-03990
Seunghyon Kang, Hyeonghun Kim, Boris Kramer:
Parametric Operator Inference to Simulate the Purging Process in Semiconductor Manufacturing. CoRR abs/2504.03990 (2025)

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