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"Tensor-based process control and monitoring for semiconductor ..."

Yanrong Li et al. (2024)

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DOI: 10.48550/ARXIV.2401.17573

access: open

type: Informal or Other Publication

metadata version: 2024-02-08

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  - journals/corr/abs-2401-17573
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  - https://dblp.org/rec/journals/corr/abs-2401-17573
Yanrong Li, Juan Du, Fugee Tsung, Wei Jiang:
Tensor-based process control and monitoring for semiconductor manufacturing with unstable disturbances. CoRR abs/2401.17573 (2024)

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