"Reinforcement Learning for Process Control with Application in ..."

Yanrong Li, Juan Du, Wei Jiang (2021)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2021-10-28

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-2110-11572
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  - https://dblp.org/rec/journals/corr/abs-2110-11572
Yanrong Li, Juan Du, Wei Jiang:
Reinforcement Learning for Process Control with Application in Semiconductor Manufacturing. CoRR abs/2110.11572 (2021)

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