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"An efficient plasma-surface interaction surrogate model for sputtering ..."

Tobias Gergs, Borislav Borislavov, Jan Trieschmann (2021)

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DOI: 10.48550/ARXIV.2109.01406

access: open

type: Informal or Other Publication

metadata version: 2023-07-07

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  - journals/corr/abs-2109-01406
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  - https://dblp.org/rec/journals/corr/abs-2109-01406
Tobias Gergs, Borislav Borislavov, Jan Trieschmann:
An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks. CoRR abs/2109.01406 (2021)

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