"Geometrical Variation Analysis of an Electrothermally Driven Polysilicon ..."

M. Shamshirsaz, M. Maroufi, M. B. Asgari (2008)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0805-0888
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0805-0888
M. Shamshirsaz, M. Maroufi, M. B. Asgari:
Geometrical Variation Analysis of an Electrothermally Driven Polysilicon Microactuator. CoRR abs/0805.0888 (2008)

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