"0-level Vacuum Packaging RT Process for MEMS Resonators"

Nicolas Abelé et al. (2008)

> Home

Details and statistics

DOI: —

access: open

type: Informal or Other Publication

metadata version: 2021-04-13

- view
  - electronic edition @ arxiv.org (open access)
- export record
  dblp key:
  - journals/corr/abs-0802-3093
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0802-3093
Nicolas Abelé, Daniel Grogg, C. Hibert, Fabrice Casset, Pascal Ancey, Adrian M. Ionescu:
0-level Vacuum Packaging RT Process for MEMS Resonators. CoRR abs/0802.3093 (2008)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.