"Characterisation of the Etching Quality in Micro-Electro-Mechanical ..."

Péter G. Szabó et al. (2007)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0711-3301
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0711-3301
Péter G. Szabó, Balázs Németh, Márta Rencz, Bernard Courtois:
Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology. CoRR abs/0711.3301 (2007)

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