"Nano-artifact metrics based on random collapse of resist."

Tsutomu Matsumoto et al. (2014)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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  - journals/corr/MatsumotoHOINHSSTO14
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  - https://dblp.org/rec/journals/corr/MatsumotoHOINHSSTO14
Tsutomu Matsumoto, Morihisa Hoga, Yasuyuki Ohyagi, Mikio Ishikawa, Makoto Naruse, Kenta Hanaki, Ryosuke Suzuki, Daiki Sekiguchi, Naoya Tate, Motoichi Ohtsu:
Nano-artifact metrics based on random collapse of resist. CoRR abs/1412.6271 (2014)

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