"Modeling and control of a semiconductor manufacturing process with an ..."

Edward A. Rietman, Suresh H. Patel, Earl R. Lory (1996)

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DOI: 10.1016/0305-0548(95)00062-3

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type: Journal Article

metadata version: 2020-02-18

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Edward A. Rietman, Suresh H. Patel, Earl R. Lory:
Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing. Comput. Oper. Res. 23(6): 573-585 (1996)

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