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"Development of taxonomy for classifying defect patterns on wafer bin map ..."

Dong-Hee Lee et al. (2023)

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DOI: 10.1016/J.COMPIND.2023.104005

access: closed

type: Journal Article

metadata version: 2023-09-20

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Dong-Hee Lee, Eun-Su Kim, Seung-Hyun Choi, Young-Mok Bae, Jong-Bum Park, Young-Chan Oh, Kwang-Jae Kim:
Development of taxonomy for classifying defect patterns on wafer bin map using Bin2Vec and clustering methods. Comput. Ind. 152: 104005 (2023)

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