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"Influence of sputtering power on properties of ZnO thin films fabricated ..."

Dedong Han et al. (2012)

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DOI: 10.1007/S11432-011-4347-Z

access: closed

type: Journal Article

metadata version: 2023-06-26

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  dblp key:
  - journals/chinaf/HanWZSHMI12
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  - https://dblp.org/rec/journals/chinaf/HanWZSHMI12
Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino:
Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature. Sci. China Inf. Sci. 55(4): 951-955 (2012)

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