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"Multiscale computational fluid dynamics modeling of thermal atomic layer ..."

Sungil Yun et al. (2022)

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DOI: 10.1016/J.COMPCHEMENG.2022.107757

access: closed

type: Journal Article

metadata version: 2022-06-13

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  - journals/cce/YunTOOC22
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  - https://dblp.org/rec/journals/cce/YunTOOC22
Sungil Yun, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides:
Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design. Comput. Chem. Eng. 161: 107757 (2022)

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