"Machine learning-based run-to-run control of a spatial thermal atomic ..."

Matthew Tom et al. (2022)

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DOI: 10.1016/J.COMPCHEMENG.2022.108044

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type: Journal Article

metadata version: 2023-03-21

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Matthew Tom, Sungil Yun, Henrik Wang, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides:
Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor. Comput. Chem. Eng. 168: 108044 (2022)

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