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"Design of optical emission spectroscopy based plasma parameter controller ..."

Junmo Koo et al. (2017)

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DOI: 10.1016/J.COMPCHEMENG.2017.02.009

access: closed

type: Journal Article

metadata version: 2020-10-26

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  - journals/cce/KooHPRRKBH17
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  - https://dblp.org/rec/journals/cce/KooHPRRKBH17
Junmo Koo, Daegeun Ha, Damdae Park, Hyun-Joon Roh, Sangwon Ryu, Gon-Ho Kim, Kye Hyun Baek, Chonghun Han:
Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control. Comput. Chem. Eng. 100: 38-47 (2017)

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