"Computer modeling of surface interactions and contaminant transport in ..."

M. R. Dodge, F. Shadman (2014)

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DOI: 10.1016/J.COMPCHEMENG.2014.05.018

access: closed

type: Journal Article

metadata version: 2020-05-18

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M. R. Dodge, F. Shadman:
Computer modeling of surface interactions and contaminant transport in microstructures during the rinsing of patterned semiconductor wafers. Comput. Chem. Eng. 68: 182-189 (2014)

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