"An effective procedure for sensor variable selection and utilization in ..."

Kye Hyun Baek et al. (2014)

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DOI: 10.1016/J.COMPCHEMENG.2013.09.016

access: closed

type: Journal Article

metadata version: 2020-05-18

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  - https://dblp.org/rec/journals/cce/BaekESCCH14
Kye Hyun Baek, Thomas F. Edgar, Kiwook Song, Gilheyun Choi, Han Ku Cho, Chonghun Han:
An effective procedure for sensor variable selection and utilization in plasma etching for semiconductor manufacturing. Comput. Chem. Eng. 61: 20-29 (2014)

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