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"Similarity searching for fault diagnosis of defect patterns in wafer bin maps."

Rui Wang, Songhao Wang (2023)

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DOI: 10.1016/J.CIE.2023.109679

access: closed

type: Journal Article

metadata version: 2024-01-13

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Rui Wang, Songhao Wang:
Similarity searching for fault diagnosis of defect patterns in wafer bin maps. Comput. Ind. Eng. 185: 109679 (2023)

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