"The efficiency of inspection based on out of control detection in wafer ..."

Israel Tirkel (2016)

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DOI: 10.1016/J.CIE.2016.05.022

access: closed

type: Journal Article

metadata version: 2020-02-20

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Israel Tirkel:
The efficiency of inspection based on out of control detection in wafer fabrication. Comput. Ind. Eng. 99: 458-464 (2016)

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