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"Defect detection and classification on semiconductor wafers using ..."

Francisco López de la Rosa et al. (2023)

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DOI: 10.1016/J.CIE.2023.109549

access: closed

type: Journal Article

metadata version: 2023-09-30

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Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales, Roberto Sánchez-Reolid, Antonio Fernández-Caballero:
Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network. Comput. Ind. Eng. 183: 109549 (2023)

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