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"Fault classification and timing prediction based on shipment inspection ..."
Euisuk Chung, Kyoungchan Park, Pilsung Kang (2023)
- Euisuk Chung, Kyoungchan Park, Pilsung Kang:
Fault classification and timing prediction based on shipment inspection data and maintenance reports for semiconductor manufacturing equipment. Comput. Ind. Eng. 176: 108972 (2023)
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