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"Bayesian decision analysis for optimizing in-line metrology and defect ..."

Chen-Fu Chien et al. (2023)

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DOI: 10.1016/J.CIE.2023.109421

access: closed

type: Journal Article

metadata version: 2023-09-30

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Chen-Fu Chien, Tran Hong Van Nguyen, Yi-Chiu Li, Ying-Jen Chen:
Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study. Comput. Ind. Eng. 182: 109421 (2023)

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