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"Decision-based virtual metrology for advanced process control to empower ..."

Chen-Fu Chien et al. (2022)

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DOI: 10.1016/J.CIE.2022.108245

access: closed

type: Journal Article

metadata version: 2023-09-30

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Chen-Fu Chien, Wei-Tse Hung, Chin-Wei Pan, Tran Hong Van Nguyen:
Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing. Comput. Ind. Eng. 169: 108245 (2022)

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