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"Device photolithography: Lenses for the photolithographic system."

Donald R. Herriott (1970)

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DOI: 10.1002/J.1538-7305.1970.TB02516.X

access: closed

type: Journal Article

metadata version: 2020-03-03

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  - https://dblp.org/rec/journals/bstj/Herriott70
Donald R. Herriott:
Device photolithography: Lenses for the photolithographic system. Bell Syst. Tech. J. 49(9): 2105-2116 (1970)

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