"Source/Drain Patterning FinFETs as Solution for Physical Area Scaling ..."

Jun-Sik Yoon et al. (2019)

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DOI: 10.1109/ACCESS.2019.2956503

access: open

type: Journal Article

metadata version: 2019-12-19

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Jun-Sik Yoon, Seunghwan Lee, Junjong Lee, Jinsu Jeong, Hyeok Yun, Bohyeon Kang, Rock-Hyun Baek:
Source/Drain Patterning FinFETs as Solution for Physical Area Scaling Toward 5-nm Node. IEEE Access 7: 172290-172295 (2019)

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