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"DC Performance Variations by Grain Boundary in Source/Drain Epitaxy of ..."

Jun-Sik Yoon et al. (2022)

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DOI: 10.1109/ACCESS.2022.3154049

access: open

type: Journal Article

metadata version: 2022-04-01

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  - https://dblp.org/rec/journals/access/YoonJLLLLB22
Jun-Sik Yoon, Jinsu Jeong, Seunghwan Lee, Junjong Lee, Sanguk Lee, Jaewan Lim, Rock-Hyun Baek:
DC Performance Variations by Grain Boundary in Source/Drain Epitaxy of Sub-3-nm Nanosheet Field-Effect Transistors. IEEE Access 10: 22032-22037 (2022)

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