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"A Method for Wafer Defect Detection Using Spatial Feature Points Guided ..."
Jing Yang et al. (2020)
- Jing Yang
, Yi Xu, Hai-Jun Rong, Shaoyi Du, Hongmei Zhang:
A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm. IEEE Access 8: 79056-79068 (2020)
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