"Predicting the Material Removal Rate in Chemical Mechanical Planarization ..."

Jianchao Wang et al. (2024)

> Home

Details and statistics

DOI: 10.1109/ACCESS.2023.3347289

access: open

type: Journal Article

metadata version: 2024-02-10

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/access/WangSYW24a
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/access/WangSYW24a
Jianchao Wang, Zhaoyang Shi, Pingping Yu, Zhenzhou Wang:
Predicting the Material Removal Rate in Chemical Mechanical Planarization Based on Improved Neural Network. IEEE Access 12: 6329-6338 (2024)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.