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"Analysis of the Effect of UV-LIGA Fabrication Error on the Microspring ..."

Yu Qin et al. (2019)

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DOI: 10.1109/ACCESS.2019.2949386

access: open

type: Journal Article

metadata version: 2021-08-26

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Yu Qin, Liangyu Chen, Yongping Hao, Shuangjie Liu, Xianlong Hu:
Analysis of the Effect of UV-LIGA Fabrication Error on the Microspring Elastic Coefficient. IEEE Access 7: 156121-156128 (2019)

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