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"Novel Dual Work Function Buried Channel Array Transistor Process Design ..."
Dong-Sik Park et al. (2024)
- Dong-Sik Park, Dong-Hyun Im, Yun-Jung Kim, Sung Sam Lee, Byung-Jae Kang, Jae-Hong Seo, Taewoong Koo, Byoungdeog Choi:
Novel Dual Work Function Buried Channel Array Transistor Process Design for Sub-17 nm DRAM. IEEE Access 12: 63049-63065 (2024)
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