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"Time-Series Forecast-Based Endpoint Thickness Compensation for Thinning of ..."

Yu-Kun Lin, Bing-Fei Wu (2023)

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DOI: 10.1109/ACCESS.2023.3247430

access: open

type: Journal Article

metadata version: 2023-03-28

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Yu-Kun Lin, Bing-Fei Wu:
Time-Series Forecast-Based Endpoint Thickness Compensation for Thinning of Sapphire Wafer. IEEE Access 11: 21252-21263 (2023)

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