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"Machine Learning-Based Wheel Monitoring for Sapphire Wafers."

Yu-Kun Lin, Bing-Fei Wu (2021)

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DOI: 10.1109/ACCESS.2021.3067329

access: open

type: Journal Article

metadata version: 2021-04-29

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Yu-Kun Lin, Bing-Fei Wu:
Machine Learning-Based Wheel Monitoring for Sapphire Wafers. IEEE Access 9: 46348-46363 (2021)

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