"A Digital Twin Framework With Meta- and Transfer Learning for Scalable ..."

Chin-Yi Lin, Tzu-Liang Tseng, Tsung-Han Tsai (2025)

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DOI: 10.1109/ACCESS.2025.3568002

access: open

type: Journal Article

metadata version: 2025-06-11

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Chin-Yi Lin, Tzu-Liang Tseng, Tsung-Han Tsai:
A Digital Twin Framework With Meta- and Transfer Learning for Scalable Multi-Machine Modeling and Optimization in Semiconductor Manufacturing. IEEE Access 13: 84380-84398 (2025)

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