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"Elliptic Arc Fitting for the Shape Control System of Silicon Single ..."

Pengliang Li, Ding Liu (2020)

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DOI: 10.1109/ACCESS.2020.2972612

access: open

type: Journal Article

metadata version: 2020-03-03

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Pengliang Li, Ding Liu:
Elliptic Arc Fitting for the Shape Control System of Silicon Single Crystal Growth. IEEE Access 8: 28979-28987 (2020)

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