"An Improved Dimensional Measurement Method of Staircase Patterns With ..."

Peizhen Hong et al. (2020)

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DOI: 10.1109/ACCESS.2020.3012012

access: open

type: Journal Article

metadata version: 2020-08-26

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Peizhen Hong, Zhiguo Zhao, Jun Luo, Zhiliang Xia, Xiaojing Su, Libin Zhang, Chunlong Li, Zongliang Huo:
An Improved Dimensional Measurement Method of Staircase Patterns With Higher Precision in 3D NAND. IEEE Access 8: 140054-140061 (2020)

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